Metal Oxide Semiconductors Synthesis Properties and Devices 1st Edition by Zhigang Zang, Wensi Cai, Yong Zhou ISBN

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Author: Zhigang Zang, Wensi Cai, Yong Zhou

Metal Oxide Semiconductors

Up-to-date resource highlighting highlights emerging applications of metal oxide semiconductors in various areas and current challenges and directions in commercialization

Metal Oxide Semiconductors provides a current understanding of oxide semiconductors, covering fundamentals, synthesizing methods, and applications in diodes, thin-film transistors, gas sensors, solar cells, and more. The text presents state-of-the-art information along with fundamental prerequisites for understanding and discusses the current challenges in pursuing commercialization and future directions of this field.

Despite rapid advancements in the materials science and device physics of oxide semiconductors over the past decade, the understanding of science and technology in this field remains incomplete due to its relatively short research history; this book aims to bridge the gap between the rapidly advancing research progress in this field and the demand for relevant materials and devices by researchers, engineers, and students.

Written by three highly qualified authors, Metal Oxide Semiconductors discusses sample topics such as:

• Fabrication techniques and principles, covering vacuum-based methods, including sputtering, atomic layer deposition and evaporation, and solution-based methods
• Fundamentals, progresses, and potentials of p–n heterojunction diodes, Schottky diodes, metal-insulator-semiconductor diodes, and self-switching diodes
• Applications in thin-film transistors, detailing the current progresses and challenges towards commercialization for n-type TFTs, p-type TFTs, and circuits
• Detailed discussions on the working mechanisms and representative devices of oxide-based gas sensors, pressure sensors, and PH sensors
• Applications in optoelectronics, both in solar cells and ultraviolet photodetectors, covering their parameters, materials, and performance
• Memory applications, including resistive random-access memory, transistor-structured memory devices, transistor-structured artificial synapse, and optical memory transistors

A comprehensive monograph covering all aspects of oxide semiconductors, Metal Oxide Semiconductors is an essential resource for materials scientists, electronics engineers, semiconductor physicists, and professionals in the semiconductor and sensor industries who wish to understand all modern developments that have been made in the field.

Table of contents:

Chapter 1. Metal Oxide Semiconductors: State-of-the-Art and New Challenges
1.1 Introduction
1.2 n-Type Metal Oxide Semiconductors
1.2.1 ZnO
1.2.2 SnO₂
1.2.3 In₂O₃
1.2.4 TiO₂
1.2.5 Ga₂O₃
1.3 p-Type Metal Oxide Semiconductors
1.3.1 Copper Oxides (CuO/Cu₂O)
1.3.2 SnO
1.3.3 NiOₓ

Chapter 2. Fabrication Techniques and Principles
2.1 Introduction
2.2 Vacuum-Based Methods
2.2.1 Sputtering
2.2.2 Atomic Layer Deposition (ALD)
2.2.3 Evaporation
2.3 Solution-Based Methods
2.3.1 0D Oxide Semiconductors
2.3.2 1D Oxide Semiconductors
2.3.3 2D Oxide Semiconductors
2.3.4 3D Oxide Semiconductors

Chapter 3. Metal Oxide Semiconductors for Diodes
3.1 Introduction
3.2 P–N Heterojunction Diodes
3.2.1 Representative Devices
3.2.2 Applications
3.3 Schottky Diodes
3.3.1 Working Mechanisms
3.3.2 ZnO Schottky Diodes
3.3.3 IGZO Schottky Diodes
3.3.4 Ga₂O₃ Schottky Diodes
3.4 Metal–Insulator–Semiconductor Diodes
3.4.1 MIS Schottky Diodes
3.4.2 MIS Tunneling Diodes
3.4.3 Applications
3.5 Self-Switching Diodes

Chapter 4. Metal Oxide Semiconductors for Transistors
4.1 Introduction
4.2 Device Structures and Mechanisms
4.3 n-Type TFTs
4.3.1 History Overview
4.3.2 Composition
4.3.3 Low Power Consumption
4.3.4 Stability
4.3.5 Solution-Based TFTs
4.4 p-Type TFTs
4.4.1 Copper Oxides
4.4.2 Tin Monoxide
4.4.3 Nickel Oxide
4.5 Circuit Applications
4.5.1 Oxide NMOS/PMOS
4.5.2 Oxide CMOS

Chapter 5. Metal Oxide Semiconductors for Sensors
5.1 Introduction
5.2 Metal Oxide-Based Gas Sensors
5.2.1 Mechanisms of Gas Sensors
5.2.2 VOCs Detection
5.2.3 Environmental Pollution Gas Detection
5.2.4 Humidity Detection
5.2.5 Explosives Detection
5.2.6 Chemical Warfare Agent Detection
5.3 Metal Oxide-Based Pressure Sensors
5.3.1 Working Mechanisms and Performance Characterizations
5.3.2 ZnO-Based Pressure Sensors
5.3.3 Other Pressure Sensors
5.4 Metal Oxide-Based pH Sensors
5.4.1 Working Mechanisms and Performance Characterizations
5.4.2 Potentiometric pH Sensors
5.4.3 Ion-Sensitive Field-Effect Transistor pH Sensors
5.4.4 Chemiresistive/Conductimetric pH Sensors

Chapter 6. Metal Oxide Semiconductors for Solar Cells
6.1 Introduction
6.2 Solar Cell Principles
6.3 Metal Oxide Solar Cells
6.3.1 Cu₂O Solar Cells
6.3.2 CuO Solar Cells
6.3.3 Co₃O₄ Solar Cells
6.4 Metal Oxide Functional Layers in Solar Cells
6.4.1 Metal Oxide Photoelectrodes in DSSCs
6.4.1.1 TiO₂ Electrodes
6.4.1.2 ZnO Electrodes
6.4.1.3 Nb₂O₅ Electrodes
6.4.2 Metal Oxide Carrier Transport Layers in Perovskite Solar Cells
6.4.2.1 TiO₂ ETLs
6.4.2.2 SnO₂ ETLs
6.4.2.3 ZnO ETLs
6.4.2.4 Metal Oxide HTLs

Chapter 7. Metal Oxide Semiconductors for Ultraviolet Photodetectors
7.1 Introduction
7.2 Device Structures of UV Photodetectors
7.2.1 Photoconductors
7.2.2 Schottky Photodiodes
7.2.3 MSM Photodetectors
7.2.4 p-(i)-n Photodiodes
7.2.5 Avalanche Photodiodes
7.2.6 Phototransistors
7.3 Important Parameters of UV Photodetectors
7.4 Materials and Performance of UV Photodetectors
7.4.1 ZnO-Based UV Photodetectors
7.4.2 Ga₂O₃-Based UV Photodetectors
7.4.3 TiO₂-Based UV Photodetectors
7.4.4 WO₃-Based UV Photodetectors
7.4.5 SnO₂-Based UV Photodetectors
7.4.6 Other Metal Oxide UV Photodetectors
7.5 Conclusion and Outlooks

Chapter 8. Metal Oxide Semiconductors for Memory Applications
8.1 Introduction
8.2 Resistive Random-Access Memory
8.2.1 Resistive Switching Mechanisms
8.2.2 Performance Characterization
8.2.3 Representative Devices
8.3 Transistor-Structured Memory Devices
8.3.1 Working Mechanisms
8.3.2 Representative Devices
8.4 Other Memory Devices

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Tags: Zhigang Zang, Wensi Cai, Yong Zhou, Metal Oxide Semiconductors, Synthesis, Properties, Devices